High-accuracy magnification calibration for a microscope based on an improved discrete Fourier transform

Xianglu Dai; Huimin Xie; Chuanwei Li; Zhu Wu; Hongxia Geng

doi:10.1117/1.OE.52.11.114102

18 November 2013 High-accuracy magnification calibration for a microscope based on an improved discrete Fourier transform

Xianglu Dai, Huimin Xie, Chuanwei Li, Zhu Wu, Hongxia Geng

Author Affiliations +

Optical Engineering, Vol. 52, Issue 11, 114102 (November 2013). https://doi.org/10.1117/1.OE.52.11.114102

Abstract

Microscopes are widely applied in characterizing feature sizes at the micro-/nanoscale, and magnification calibration plays a key role in achieving precise measurements. However, it is difficult to obtain accurate results by using the general magnification calibration method if comparing the displayed size of a test-piece under microscope and its original one. In this study, a high-accuracy and automatic magnification calibration method that could be applied to different types of microscopes is proposed. A standard grating is employed as the reference, and a high-resolution discrete Fourier transform is used to analyze the images captured under various magnifications in this method. With utilization of the high-order harmonic component in the Fourier spectrum, the proposed method is capable of performing the calibration over a wide range of magnifications while maintaining identical precision. The relative error of the proposed method can be theoretically limited to 0.01%; moreover, the image noise can be tolerated. Furthermore, the validation and extensive adaptability of this method are demonstrated by calibrating the magnification of a scanning electron microscope and an optical microscope.

Citation Download Citation

Xianglu Dai, Huimin Xie, Chuanwei Li, Zhu Wu, and Hongxia Geng "High-accuracy magnification calibration for a microscope based on an improved discrete Fourier transform," Optical Engineering 52(11), 114102 (18 November 2013). https://doi.org/10.1117/1.OE.52.11.114102

Published: 18 November 2013

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