24 January 2022 Displacement calculation method for homodyne interferometers based on spatial phase delay of beams
Yizhou Xia, Ming Zhang, Yu Zhu, Weinan Ye
Author Affiliations +
Abstract

Based on the spatial phase delay of beams, a displacement measurement method is proposed for homodyne interferometers. In this method, two detectors are arranged in the interference spot to collect signals. Based on the algorithm of least squares fitting the parameters of the ellipse equation, the relative phase of the signals is solved to calculate the displacement. The proposed method uses optical fiber bundles for beam reception, which is more compact in structure than the traditional quadrature phase calculation method, and eliminates polarization mixing. The spatial delay phase in the method can be any unknown constant, which makes it more applicable in practice. The feasibility of this method is verified by ZEMAX simulations and experiments. The experimental results show that the 3σ of errors without the effect of power noise and vibration is 7.2 nm.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Yizhou Xia, Ming Zhang, Yu Zhu, and Weinan Ye "Displacement calculation method for homodyne interferometers based on spatial phase delay of beams," Optical Engineering 61(1), 014106 (24 January 2022). https://doi.org/10.1117/1.OE.61.1.014106
Received: 14 October 2021; Accepted: 3 January 2022; Published: 24 January 2022
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Cited by 5 scholarly publications.
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KEYWORDS
Interferometers

Homodyne detection

Sensors

Optical engineering

Phase measurement

Modulation

Zemax

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