Large-aperture high-accuracy phase-shifting digital flat interferometer

Jinbang Chen; Dezhen Song; Rihong Zhu; D. Chen; Qingyun Wang; L. Chen; Yiguang Zhang

doi:10.1117/12.165473

10 December 1993 Large-aperture high-accuracy phase-shifting digital flat interferometer

Jinbang Chen, Dezhen Song, Rihong Zhu, D. Chen, Qingyun Wang, L. Chen, Yiguang Zhang

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165473
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This paper describes a large-aperture high-accuracy phase-shifting digital flat interferometer which is a combination of optic, mechanics, electricity, and algorithm. The aperture size is 250 mm and liquid surface is used as an absolute flat to eliminate systemic error. The accuracy is better than (lambda) /50 ((lambda) is Hz-Ne laser wavelength) (peak-to-valley value). The tested aperture can be enlarged to 500 mm. This interferometer will be used as our country optical flat standard instrument. This paper describes the optical interferometer, phase shifter, and calibration of precision.

Citation Download Citation

Jinbang Chen, Dezhen Song, Rihong Zhu, D. Chen, Qingyun Wang, L. Chen, and Yiguang Zhang "Large-aperture high-accuracy phase-shifting digital flat interferometer", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165473

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