New technique for testing large optical flat

Qingyun Wang; Jinbang Chen; Rihong Zhu; Lei Chen; Yiguang Zhang

doi:10.1117/12.165477

10 December 1993 New technique for testing large optical flat

Qingyun Wang, Jinbang Chen, Rihong Zhu, Lei Chen, Yiguang Zhang

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165477
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

This paper discusses the development of a new technique (including theory, method, and equipment, etc.) for testing larger optical flat only by means of a smaller interferometer. It is an overlapping subaperture interference testing (OSIT) technique. The author has established a mathematics model for OSIT to retrieve the surface of the full aperture. The theoretical accuracy of the retrieved surface of the full aperture reached (lambda) /200 (p-v). The relationship between the accuracy of the retrieved wavefront of full aperture and errors (such as system error of interferometer or position error of subapertures, etc.) has been investigated. A computer program was established to simulate the real procedure from testing surface data of subaperture to retrieved wavefront of full aperture.

Citation Download Citation

Qingyun Wang, Jinbang Chen, Rihong Zhu, Lei Chen, and Yiguang Zhang "New technique for testing large optical flat", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165477

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