Grating couplers in tapered waveguides for integrated optical sensing

Rino E. Kunz; Johannes P. Edlinger; B. J. Curtis; Michael T. Gale; Lothar U. Kempen; Helmut Rudigier; Helmut Schuetz

doi:10.1117/12.170679

10 March 1994 Grating couplers in tapered waveguides for integrated optical sensing

Rino E. Kunz, Johannes P. Edlinger, B. J. Curtis, Michael T. Gale, Lothar U. Kempen, Helmut Rudigier, Helmut Schuetz

Proceedings Volume 2068, Chemical, Biochemical, and Environmental Fiber Sensors V; (1994) https://doi.org/10.1117/12.170679
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

Design considerations and experimental results are presented for the fabrication and characterization of grating couplers in gradient effective index waveguides used for realizing miniature integrated optical sensor modules. Hard dielectric substrates such as glass and fused silica have been structured by photolithographic techniques, while hot embossing has been used for the grating fabrication in plastic substrates. The gradient effective index waveguides were produced by shadow mask evaporation techniques in one single deposition step in a rotating substrate holder arrangement. Optical diffraction measurements, atomic force microscopy, and a newly developed method based on performing spatially resolved grating coupler resonance angle measurements are shown to be valuable tools for the characterization of the waveguides and the grating couplers. The experimental results indicate that the deposition of high-index waveguiding films such as Ta₂O₅ and TiO₂ on previously structured substrates is a viable technique for the cost-effective fabrication of integrated optical sensor chips.

Citation Download Citation

Rino E. Kunz, Johannes P. Edlinger, B. J. Curtis, Michael T. Gale, Lothar U. Kempen, Helmut Rudigier, and Helmut Schuetz "Grating couplers in tapered waveguides for integrated optical sensing", Proc. SPIE 2068, Chemical, Biochemical, and Environmental Fiber Sensors V, (10 March 1994); https://doi.org/10.1117/12.170679

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available