Parallel common path phase-shifting interferometer with a digital reflective grating

Hongyi Bai; Mingguang Shan; Zhi Zhong; Lili Guo; Yabin Zhang

doi:10.1117/12.2211285

26 January 2016 Parallel common path phase-shifting interferometer with a digital reflective grating

Hongyi Bai, Mingguang Shan, Zhi Zhong, Lili Guo, Yabin Zhang

Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99030O (2016) https://doi.org/10.1117/12.2211285
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China

Abstract

A parallel common path phase-shifting interferometer is presented using a digital reflective grating realized by a digital micromirror device (DMD). The interferometer based on a modified Michelson architecture is constructed by a beamsplitter, a pinhole mirror, a digital reflective Ronchi grating and two lenses with same focal length to build a 4f optical system. In the interferometer, the pinhole mirror is used to low-filter the input-beam to act as reference beam, and the grating is used to introduce phase shift among +1, 0, and −1 diffraction orders of the input-beam to act as object beam. Then the specimen phase can be reconstructed from the three phase-shifted interferograms recorded in one shot using a normalize algorithm. The theoretical analysis and experiments are carried out to demonstrate the feasibility and accuracy of the proposed method.

Citation Download Citation

Hongyi Bai, Mingguang Shan, Zhi Zhong, Lili Guo, and Yabin Zhang "Parallel common path phase-shifting interferometer with a digital reflective grating", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99030O (26 January 2016); https://doi.org/10.1117/12.2211285

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