Projection lens testing with Moiré effect

M. Loktev; Y. Shao

doi:10.1117/12.2264343

28 March 2017 Projection lens testing with Moiré effect

M. Loktev, Y. Shao

Proceedings Volume 10145, Metrology, Inspection, and Process Control for Microlithography XXXI; 101452S (2017) https://doi.org/10.1117/12.2264343
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

The application of Moiré effect for testing of a lithographic projection lens is reported. The arrangement presented allows measuring magnification, distortion, field curvature and telecentricity of the lens and can be used for its fine tuning. The method is based on two matched two-dimensional gratings, positioned in mutually conjugated planes; one of them can be translated. Visual interpretation of Moiré fringe pattern allows quick diagnostics of position errors exceeding critical dimension, whereas lateral scanning is applied for measuring of smaller magnitude errors. Field curvature and telecentricity are measured by 3D scanning. Presented results are in a good agreement with those obtained elsewhere.

Citation Download Citation

M. Loktev and Y. Shao "Projection lens testing with Moiré effect", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 101452S (28 March 2017); https://doi.org/10.1117/12.2264343

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available