Self-calibration in two dimensions: the experiment

Michael T. Takac; Jun Ye; Michael R. Raugh; Roger Fabian W. Pease; C. Neil Berglund; Gerry Owen

doi:10.1117/12.240149

21 May 1996 Self-calibration in two dimensions: the experiment

Michael T. Takac, Jun Ye, Michael R. Raugh, Roger Fabian W. Pease, C. Neil Berglund, Gerry Owen

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240149
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

A two-dimensional self-calibration experiment obtains Cartesian traceability for high-precision tools. The calibration procedure incorporates group theory principles to solve our industry's two-dimensional calibration problem. With group theory, a Cartesian system is obtainable through mathematics; thus, eliminating the need for any certified standards. The calibration algorithm was developed by Jun Ye at Stanford University and funded by the Semiconductor Research Corporation (SRC) with collaboration from Hewlett Packard (HP) and IBM. The data was collected from Leica's LMS2000 and LMS2020 systems.

Citation Download Citation

Michael T. Takac, Jun Ye, Michael R. Raugh, Roger Fabian W. Pease, C. Neil Berglund, and Gerry Owen "Self-calibration in two dimensions: the experiment", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240149

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