Multiple wavelength fringe analysis for surface profile measurements

Paul Kumar Upputuri; Manojit Pramanik

doi:10.1117/12.2508310

4 March 2019 Multiple wavelength fringe analysis for surface profile measurements

Proceedings Volume 10887, Quantitative Phase Imaging V; 108872E (2019) https://doi.org/10.1117/12.2508310
Event: SPIE BiOS, 2019, San Francisco, California, United States

Abstract

Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been successfully used to extend the unambiguous step height measurement rage of single wavelength interferometer. The use of RGB CCD camera allows simultaneous acquisition of fringes generated at different wavelengths. In this work, we discuss details about the fringe analysis of white light interferograms acquired using colour CCD camera. The colour image acquired using RGB camera is decomposed in to red, green, blue components and corresponding interference phase is measured using phase evaluation algorithms. The approach makes the 3D surface measurements faster, cost-effective for industrial applications.

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Paul Kumar Upputuri and Manojit Pramanik "Multiple wavelength fringe analysis for surface profile measurements ", Proc. SPIE 10887, Quantitative Phase Imaging V, 108872E (4 March 2019); https://doi.org/10.1117/12.2508310

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KEYWORDS

Charge-coupled devices

Phase shifts

Profiling

RGB color model

Interferometry

Fringe analysis

CCD cameras

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