Design and optimized fabrication techniques for highly-efficient dielectric meta-optical Airy beam generators

G. Yerragadda; R. Dharmavarapu; S. Juodkazis; S. Bhattacharya

doi:10.1117/12.2575900

5 March 2021 Design and optimized fabrication techniques for highly-efficient dielectric meta-optical Airy beam generators

G. Yerragadda, R. Dharmavarapu, S. Juodkazis, S. Bhattacharya

Author Affiliations +

Proceedings Volume 11695, High Contrast Metastructures X; 116951G (2021) https://doi.org/10.1117/12.2575900
Event: SPIE OPTO, 2021, Online Only

Abstract

Dielectric meta-surface optical elements are of interest for a variety of interests, one of which is due to their high efficiency. Elements with binary structures that are easy to fabricate can have more than two phase levels, unlike diffractive elements. Previously reported work on meta-surfaces for complex light generation has focused mainly on beams with orbital angular momentum or Bessel beams. A few papers also talk about Airy beams. The latter have been found to have important applications in areas such as light sheet microscopy. These earlier papers describe the meta-surfaces in detail without dwelling on the various design and fabrication steps required to achieve a highly efficient element. Therefore, in this paper, we describe the design process in detail and highlight the key parameters that must be carefully optimized for successful fabrication. Finally, test results of a highly efficient, dielectric meta-surface cubic phase plate (CPP) are presented. The element has 8 phase levels and generates an Airy beam at the wavelength of 1064 nm. The focus of this work is to present a detailed step-by-step design flow, as well as the means by which to optimize the fabrication of those 8 levels. The phase variation is achieved by a change in the lateral dimensions. While the sizes are unique for each phase level, they are all sub-micron and this is where the fabrication challenge lies.

Conference Presentation

Citation Download Citation

G. Yerragadda, R. Dharmavarapu, S. Juodkazis, and S. Bhattacharya "Design and optimized fabrication techniques for highly-efficient dielectric meta-optical Airy beam generators", Proc. SPIE 11695, High Contrast Metastructures X, 116951G (5 March 2021); https://doi.org/10.1117/12.2575900

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