The preparation of silicon carbide and its corresponding properties for electronic packaging applications

Xiaoli Zhang; Xiaoyi Zhang; Zhuo Wang; Liwei Mi; Wenjie Fan

doi:10.1117/12.2667282

6 March 2023 The preparation of silicon carbide and its corresponding properties for electronic packaging applications

Xiaoli Zhang, Xiaoyi Zhang, Zhuo Wang, Liwei Mi, Wenjie Fan

Proceedings Volume 12553, Fourth International Conference on Optoelectronic Science and Materials (ICOSM 2022); 125530J (2023) https://doi.org/10.1117/12.2667282
Event: 2022 4th International Conference on Optoelectronic Science and Materials (ICOSM2022), 2022, Henfei, China

Abstract

Traditional packaging materials are suffering from poor high-temperature-using, however, the SiC own ideal coefficient of thermal expansion (CTE) and thermal conductivity (TC), and at the same time, it can be used in high temperatures meeting the requirement of the advanced electronic packaging. But traditionally, SiC is made at a high temperature and with a complex producing process. Some researchers are focused on SiC with some Al additions, but we know that Al will volatilize when the samples are heated over than melt-point, so this method would also strict its applications. Other works had been taken on diamond addition to realize packaging function, but this method needed a high-temperature infiltration process too. In fact, the non-method above was economic or convenient to manufacture in nowadays industry practice. Fortunately, a new way to gain dense SiC at a very low temperature in an open environment had been gotten by our group.

Citation Download Citation

Xiaoli Zhang, Xiaoyi Zhang, Zhuo Wang, Liwei Mi, and Wenjie Fan "The preparation of silicon carbide and its corresponding properties for electronic packaging applications", Proc. SPIE 12553, Fourth International Conference on Optoelectronic Science and Materials (ICOSM 2022), 125530J (6 March 2023); https://doi.org/10.1117/12.2667282

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available