Next-generation mask strategy: are technologies ready for mass production of 256 MDRAM? Summary of Photomask Japan '97 Panel Discussion

Hiroaki Morimoto; Naoya Hayashi; Hideaki Hamada

doi:10.1117/12.301189

12 February 1997 Next-generation mask strategy: are technologies ready for mass production of 256 MDRAM? Summary of Photomask Japan '97 panel discussion

Hiroaki Morimoto, Naoya Hayashi, Hideaki Hamada

Author Affiliations +

Proceedings Volume 3236, 17th Annual BACUS Symposium on Photomask Technology and Management; (1997) https://doi.org/10.1117/12.301189
Event: 17th Annual BACUS Photomask Technology and Management, 1997, Redwood City, CA, United States

Abstract

A panel discussion on mask technologies for 0.2-micrometer rule devices was held at Photomask Japan '97. This paper summarizes the discussion to make clear what is really needed to the mask, and what is a key issue to overcome. Required CD uniformity is satisfied by the improvement in resist/etching process and pattern writing accuracy. PSM key issues are defect inspection and repair. OPC is indispensable for 0.2 micrometer device, so the improvement in mask pattern fidelity and defect inspection technology is strongly required, but some limitation in OPC pattern design will be necessary to realize the OPC technology in mass production. To achieve both technology and cost, the partnership of captive and merchant mask shop, and the partnership of lithography, device, mask, equipment, and material vendors will be very important.

Citation Download Citation

Hiroaki Morimoto, Naoya Hayashi, and Hideaki Hamada "Next-generation mask strategy: are technologies ready for mass production of 256 MDRAM? Summary of Photomask Japan '97 panel discussion", Proc. SPIE 3236, 17th Annual BACUS Symposium on Photomask Technology and Management, (12 February 1997); https://doi.org/10.1117/12.301189

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available