Fabrication and characterization of three-dimensional microfluidic arrays

Sheldon M. Kugelmass; Chao Lin; Sheila H. DeWitt

doi:10.1117/12.359325

19 August 1999 Fabrication and characterization of three-dimensional microfluidic arrays

Sheldon M. Kugelmass, Chao Lin, Sheila H. DeWitt

Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359325
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

3D microfluidic arrays, containing a network of channels and vias, have been fabricated in Pyrex, and silicon, using a range of techniques including chemical etching, deep reactive ion etching, laser micromachining and anodic bonding. Fluid is distributed along the layers of the structure through this series of lateral channels and passes from layer to layer through via holes. Vias on the order of 50 micrometers in diameter act as valves or `capillary breaks'; in which surface tension forces prevent the continued flow of fluid. An increase in the pressure head in the line causes the capillary break to yield, switching the valve, and allowing fluid to flow to the next layer. Circuit network models were applied to determine device parameters to balance pressure losses and allow uniform distribution to 12 branches from a single feed line more than 30 mm in length. These arrays have been employed in a 10 X 10 array of microchannels and microreactors to synthesize a library of 100 unique organic compounds in a 4-step solid phase synthesis protocol. All of the products generated had product purities < 70% (HPLC Area%).

Citation Download Citation

Sheldon M. Kugelmass, Chao Lin, and Sheila H. DeWitt "Fabrication and characterization of three-dimensional microfluidic arrays", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359325

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