Micro-moire methods: optical and scanning techniques

Anand Krishna Asundi; Huimin Xie; Chongxiang Li; Chai Gin Boay; Kim Eng Oh

doi:10.1117/12.426994

8 May 2001 Micro-moire methods: optical and scanning techniques

Anand Krishna Asundi, Huimin Xie, Chongxiang Li, Chai Gin Boay, Kim Eng Oh

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.426994
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

Moire method is an effective way to measure full field deformation. In this paper, the atomic force microscope scanning moire method and micro-moire interferometry method are proposed to determine the deformation in micro-area. The measurement principle and techniques are discussed. The two methods are applied to measure thermal deformation in a BGA (ball grid array) electronic package component. The shear strain (gamma) _xy at the solder site is determined. The experimental results including the adaptability of these two methods are compared and analyzed. The results show that AFM scanning moire and micro-moire interferometry methods are effective ways to measure the deformation in micro-area with high sensitivity.

Citation Download Citation

Anand Krishna Asundi, Huimin Xie, Chongxiang Li, Chai Gin Boay, and Kim Eng Oh "Micro-moire methods: optical and scanning techniques", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.426994

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