Electrostatically driven micro-optical switching device based on interference of light and evanescent coupling

Toshiaki Oguchi; Masanori Hayase; Takeshi Hatsuzawa

doi:10.1117/12.467386

18 October 2002 Electrostatically driven micro-optical switching device based on interference of light and evanescent coupling

Toshiaki Oguchi, Masanori Hayase, Takeshi Hatsuzawa

Author Affiliations +

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467386
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

Two types of electrostatically driven optical switching devices have been developed in this paper. An interferometric optical switching device realizes selective wavelength filtering by the interference of lightwaves between two half mirrors. Also, an evanescent coupling surface-output optical switching device realizes on-off switching by evanescent coupling and physical contact. Their basic characteristics are experimentally evaluated. By integrating these devices on a substrate, switching devices with wavelength filtering and on-off switching are proposed.

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Toshiaki Oguchi, Masanori Hayase, and Takeshi Hatsuzawa "Electrostatically driven micro-optical switching device based on interference of light and evanescent coupling", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467386

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