Novel micro fiber spectrometer

Zhiyu Wen; Gang Chen; Shanglian Huang

doi:10.1117/12.477935

21 January 2003 Novel micro fiber spectrometer

Zhiyu Wen, Gang Chen, Shanglian Huang

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477935
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A scheme of a novel hybrid integrated micro spectrometer is proposed, which greatly reduces the number of optical units used in the system and can easily realize the integration of the optical unit and the detecting array. At the same time, the effective area of the grating is increased. One model of such device is fabricated. It is about 60mm×40mm×40mm and the volume can be further reduced. In experiments, the spectrum signal of Hg lamp and tungsten lamp is obtained. The result shows that a resolution of 7nm is achieved when a single mode fiber is used as the light input device.

Citation Download Citation

Zhiyu Wen, Gang Chen, and Shanglian Huang "Novel micro fiber spectrometer", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); https://doi.org/10.1117/12.477935

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