Paper
7 September 2006 Laboratory-based x-ray micro-tomography with submicron resolution
S. Mayo, P. Miller, S. W. Wilkins, D. Gao, T. Gureyev
Author Affiliations +
Abstract
X-ray Microtomography bridges the 3D analysis gap between conventional x-ray tomography and TEM tomography. The use of a laboratory-based microfocus source opens up the opportunity to gain additional benefits from in-line phase contrast for enhancing the visibility of fine features, cracks, voids and boundaries in individual views. Coupled with phase retrieval methods, such images can be used as input to conventional reconstruction algorithms for three dimensional visualization. Working at high resolution brings challenges of physical stability of the system. Software approaches to overcoming these difficulties have enabled submicron resolution 3D reconstructions.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Mayo, P. Miller, S. W. Wilkins, D. Gao, and T. Gureyev "Laboratory-based x-ray micro-tomography with submicron resolution", Proc. SPIE 6318, Developments in X-Ray Tomography V, 63181E (7 September 2006); https://doi.org/10.1117/12.680154
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Tomography

X-rays

Reconstruction algorithms

Scanning electron microscopy

Image resolution

Sensors

Phase contrast

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