Design and fabrication of a micro-mirror for spectroscopy

K. Ajay Giri Prakash; Sanjay Dhabai; Enakshi Bhattacharya; Shanti Bhattacharya

doi:10.1117/12.840994

17 February 2010 Design and fabrication of a micro-mirror for spectroscopy

K. Ajay Giri Prakash, Sanjay Dhabai, Enakshi Bhattacharya, Shanti Bhattacharya

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940X (2010) https://doi.org/10.1117/12.840994
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

A wide variety of MEMS micro-mirrors are being developed for various optical applications. One such application is Fourier Transform Spectrometry (FTS). The design, process optimization and fabrication of a micro-mirror for this application is presented. Large, non-tilting displacements of mirrors are required to achieve high FTS resolution. In order to obtain this without using Deep Reactive Ion Etching (DRIE), the micro-mirrors were fabricated on silicon using bulk micromachining techniques. This paper will present the process developed for fabrication of the mirror with the required specifications. In addition, results of the FTS experiments conducted with the micro-mirror will also be presented.

Citation Download Citation

K. Ajay Giri Prakash, Sanjay Dhabai, Enakshi Bhattacharya, and Shanti Bhattacharya "Design and fabrication of a micro-mirror for spectroscopy", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940X (17 February 2010); https://doi.org/10.1117/12.840994

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