Integration of MEMS with nanostructured metal-oxide materials for improved sensors for volatile organic compounds

Sudhir Chandra; Hardik Pandya; Anoop Vyas

doi:10.1117/12.925153

15 October 2012 Integration of MEMS with nanostructured metal-oxide materials for improved sensors for volatile organic compounds

Sudhir Chandra, Hardik Pandya, Anoop Vyas

Author Affiliations +

Proceedings Volume 8549, 16th International Workshop on Physics of Semiconductor Devices; 854919 (2012) https://doi.org/10.1117/12.925153
Event: 16th International Workshop on Physics of Semiconductor Devices, 2011, Kanpur, India

Abstract

The primary aim of the present work is to lower the operating temperature of the metal-oxide based sensors for detection of volatile organic compounds (VOCs) without compromising the sensitivity of the device. For this purpose, nanostructured oxides of ITO, Cu and Zn have been explored. The oxides of Cu and Zn have been synthesized by a novel process of thermal oxidation of the respective metal layers in air ambient without using any seed or catalyst layer. On the other hand, nanostructured ITO was obtained by RF magnetron sputtering process. For the heating of the sensing layer, a Ni microheater has been integrated on the sensor chip. Micro-electro-mechanical Systems (MEMS) technology has been adopted for the fabrication of the complete sensor for achieving the desired operating temperature at reduced power level. The sensor was extensively tested for a variety of VOCs such as acetone, methanol, ethanol and IPA. The issues involved in integrating nanostructured oxides with MEMS technology are also addressed.

Citation Download Citation

Sudhir Chandra, Hardik Pandya, and Anoop Vyas "Integration of MEMS with nanostructured metal-oxide materials for improved sensors for volatile organic compounds", Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854919 (15 October 2012); https://doi.org/10.1117/12.925153

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