High Quality Transparent Heat Reflectors Of Reactively Evaporated Indium Tin Oxide

I. Hamberg; A. Hjortsberg; C. G. Granqvist

doi:10.1117/12.933251

12 April 1982 High Quality Transparent Heat Reflectors Of Reactively Evaporated Indium Tin Oxide

I. Hamberg, A. Hjortsberg, C. G. Granqvist

Proceedings Volume 0324, Optical Coatings for Energy Efficiency and Solar Applications; (1982) https://doi.org/10.1117/12.933251
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

We report on transparent and heat-reflecting Indium-Tin-Oxide (ITO) films prepared by well controlled reactive electron-beam evaporation of In₂0₃+ 9 mol. % SnO₂ onto glass in - 5x 10_-4 Torr of 02. Typical results for 0.3 pm thick films deposited on substrates at 300°C were: visible light absorptance < 2 %, thermal infrared reflectance > 90 %, and dc resistivity 3x 10-4 Qcm. Similar properties were found for substrate temperatures down to 150°C, whereas a rapid deterioration took place at still lower temperatures. After antireflection coating with -0.1 pm of evaporated MgF₂, the visible transmittance became - 1% larger than that of the uncoated glass, while the infrared reflectance increased by a few percent only. The ITO+ MgF2 coatings show much weaker iridescence than the bare ITO films.

Citation Download Citation

I. Hamberg, A. Hjortsberg, and C. G. Granqvist "High Quality Transparent Heat Reflectors Of Reactively Evaporated Indium Tin Oxide", Proc. SPIE 0324, Optical Coatings for Energy Efficiency and Solar Applications, (12 April 1982); https://doi.org/10.1117/12.933251

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