Skip to main content
SpringerLink
Log in

Formation of hexagonal 9R silicon polytype by ion implantation

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

Transmission electron-microscopy examination revealed the appearance of a hexagonal silicon (9R polytype) inclusions in the subsrface silicon layer upon ion implantation and subsequent heat treatment of the SiO2/Si structure. The formation of this hexagonal phase is stimulated by mechanical stresses arising in the heterophase system in the course of ion implantation.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. C. Rödl, T. Sander, F. Bechstedt, et al., Phys. Rev. B 92, 045207 (2015).

    Article  ADS  Google Scholar 

  2. C. Raffy, J. Furthmüller, and F. Bechstedt, Phys. Rev. B 66, 075201 (2002).

    Article  ADS  Google Scholar 

  3. J. Bandet, B. Despax, and M. Caumont, J. Phys. D: Appl. Phys. 35, 234 (2002).

    Article  ADS  Google Scholar 

  4. R. H. Wentorf and J. S. Kasper, Science 139, 338 (1963).

    Article  ADS  Google Scholar 

  5. Y. Zhang, Z. Iqbal, S. Vijayalakshmi, and H. Grebel, Appl. Phys. Lett. 75, 2758 (1999).

    Article  ADS  Google Scholar 

  6. D. A. Pavlov, A. V. Pirogov, N. O. Krivulin, and A. I. Bobrov, Semiconductors 49, 95 (2015).

    Article  ADS  Google Scholar 

  7. A. Fissela, C. Wanga, E. Bugielb, and H. J. Osten, Microelectron. J. 36, 506 (2005).

    Article  Google Scholar 

  8. T. Y. Tan, H. Foll, and S. M. Hu, Philos. Mag. A 44, 127 (1981).

    Article  ADS  Google Scholar 

  9. N. N. Gerasimenko, A. V. Dvurechenskii, S. I. Romanov, and L. S. Smirnov, Sov. Phys. Semicond. 7, 1461 (1973).

    Google Scholar 

  10. A. N. Didenko, Yu. P. Sharkeev, E. V. Kozlov, and A. I. Ryabchikov, Effect of Long-Range Action in Ion-Implanted Metallic Materials (NTL, Tomsk, 2004) [in Russian].

    Google Scholar 

  11. D. S. Korolev, A. N. Mikhaylov, A. I. Belov, et al., Int. J. Nanotechnol. 14, 637 (2017).

    Article  ADS  Google Scholar 

  12. J. F. Ziegler, M. D. Ziegler, and J. P. Biersack, Nucl. Instrum. Methods Phys. Res. B 268, 1818 (2010).

    Article  ADS  Google Scholar 

  13. X. Liu and D. Wang, Nano Res. 2, 575 (2009).

    Article  Google Scholar 

  14. H. Cerva, Mater. Res. 6, 2324 (1991).

    Article  ADS  Google Scholar 

  15. Physical Values, The Handbook, Ed. by I. S. Grigor’ev and E. Z. Meilikhov (Energoatomizdat, Moscow, 1991) [in Russian].

Download references

Author information

Authors and Affiliations

  1. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 603950, Russia

    D. S. Korolev, A. A. Nikolskaya, N. O. Krivulin, A. I. Belov, A. N. Mikhaylov, D. A. Pavlov & D. I. Tetelbaum

  2. Ioffe Physical Technical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    N. A. Sobolev

  3. Indian Institute of Technology Jodhpur, Jodhpur, India

    M. Kumar

Authors
  1. D. S. Korolev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Nikolskaya
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. N. O. Krivulin
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. I. Belov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. N. Mikhaylov
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. D. A. Pavlov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. D. I. Tetelbaum
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. N. A. Sobolev
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. M. Kumar
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to D. I. Tetelbaum.

Additional information

Original Russian Text © D.S. Korolev, A.A. Nikolskaya, N.O. Krivulin, A.I. Belov, A.N. Mikhaylov, D.A. Pavlov, D.I. Tetelbaum, N.A. Sobolev, M. Kumar, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 16, pp. 87–92.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Korolev, D.S., Nikolskaya, A.A., Krivulin, N.O. et al. Formation of hexagonal 9R silicon polytype by ion implantation. Tech. Phys. Lett. 43, 767–769 (2017). https://doi.org/10.1134/S1063785017080211

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785017080211

Search

Navigation