Consistent Theory of Sputtering of Solid Targets by Ion Bombardment Using Power Potential Law

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Copyright (c) 1973 The Japan Society of Applied Physics
, , Citation Koichi Kanaya et al 1973 Jpn. J. Appl. Phys. 12 1297 DOI 10.1143/JJAP.12.1297

1347-4065/12/9/1297

Abstract

Starting from a simple atomic model by Lindhard giving a power potential between ions and atoms as V(r)=z1z2e2an-1/nrn, we assumed that the first collision with a metal atom is of the weakly screened type (n=2) or Rutherford type (n=1) and that subsequent collisions of displaced atoms are similar to collisions of hard spheres (n=5). On this basis, consistent expressions were obtained for the maximum yield Smax with the corresponding energy Em for n=2, and the universal curve of yield-energy, which on the number of atms in the target materials per unit volume N, the effective atomic radius a and the displacement energy Ed. The results were in good agreement with experiments over the energy range from 50 eV to 500 keV.

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10.1143/JJAP.12.1297