Abstract
InGaP crystals grown on (001)GaAs substrates by metalorganic chemical vapor deposition are structurally evaluated by transmission electron microscopy. High-resolution electron microscopy observation and electron diffraction analysis of both the (110) and the (1
0) cross-section specimens strongly suggest that ordering of column III atoms on only two sets of the (111) planes with doubling in periodicity of (111) layers, i.e., In/Ga/In/Ga/In/Ga. . ., is occurring in the crystal. The ordering of the crystal is not perfect, and the ordered regions are assumed to be plate-like microdomains.