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Emission from Pulsating Combustion of Silane at a Reduced Pressure

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Copyright (c) 1988 The Japan Society of Applied Physics
, , Citation Shinsuke Suga and Seiichiro Koda 1988 Jpn. J. Appl. Phys. 27 L1966 DOI 10.1143/JJAP.27.L1966

1347-4065/27/10A/L1966

Abstract

A pulsating combustion was found to continue successively, after a mixture of flowing SiH4/He and O2 was ignitied by appropriate means in a Pyrex vessel at a total pressure of ca. 400 Pa. Light emission in the UV and visible region was spectroscopically resolved to be composed of band emissions of SiO(\TildeA-\TildeX) and OH(\TildeA-\TildeX), as well as a broad emission in the visible region. These findings were discussed from the mechanistic viewpoints of silane combustion and chemical vapor deposition of SiO2 films.

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10.1143/JJAP.27.L1966