Sputter Deposition of BiSrCaCuO Thin Films

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Copyright (c) 1988 The Japan Society of Applied Physics
, , Citation Masao Fukutomi et al 1988 Jpn. J. Appl. Phys. 27 L632 DOI 10.1143/JJAP.27.L632

1347-4065/27/4A/L632

Abstract

The sputter deposition of superconducting Bi-Sr-Ca-Cu-O thin films was studied with particular reference to the relation between the deposition conditions and the superconducting properties of the films obtained. After annealing, the films sputtered from a sintered Bi1.3Sr1Ca1Cu1.5Ox target exhibited superconductivity with zero-resistance at 83 K. The possibility of obtaining high-Tc superconducting film without post-deposition annealing was also demonstrated.

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10.1143/JJAP.27.L632