Abstract
The sputter deposition of superconducting Bi-Sr-Ca-Cu-O thin films was studied with particular reference to the relation between the deposition conditions and the superconducting properties of the films obtained. After annealing, the films sputtered from a sintered Bi1.3Sr1Ca1Cu1.5Ox target exhibited superconductivity with zero-resistance at 83 K. The possibility of obtaining high-Tc superconducting film without post-deposition annealing was also demonstrated.