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Design and Fabrication of Highly Efficient Fan-Out Elements

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Copyright (c) 1990 The Japan Society of Applied Physics
, , Citation H. P. Herzig et al 1990 Jpn. J. Appl. Phys. 29 L1307 DOI 10.1143/JJAP.29.L1307

1347-4065/29/7A/L1307

Abstract

This paper reports the calculation and fabrication of periodic phase structures for fan-out elements with a theoretical conversion efficiency close to 100% and perfect uniformity. We have measured an efficiency of 92% for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.

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