Preparation of Lead Zirconate Titanate Thin Film by Hydrothermal Method

A hydrothermal method for preparing thin films of crystalline PZT was developed by controlling the rates of nucleation and crystal growth. This method consisted of two steps of hydrothermal reaction. The first step (nucleation process) was that in which the TiO₂ substrate reacted with the mixed solution of Pb and Zr to form PZT and/or PZ nuclei on the surface. Subsequently, the crystal growth of PZT was promoted as the next hydrothermal step (crystal growth process) by the reaction of the mixed solution of Pb, Zr and Ti. From the experimental results of PZT powder preparation, the conditions of the nucleation and crystal growth process were determined as at 150°C for 24 h and at 120°C for 48 h, respectively. It was verified that the thin films consisted of PZT polycrystals and showed ferroelectric properties.