Abstract
The characteristics of surface acoustic waves on proton-exchanged 128°-rotated Y-cut LiNbO3 were investigated at a frequency of 100 MHz. The changes of the phase velocity and the electromechanical coupling coefficient as a function of the proton-exchange depth were measured. From these experiments, the elastic constants and the piezoelectric constants of the proton-exchanged layer were determined. The effects of annealing on the phase velocity and the surface acoustic wave propagation loss were also measured.