High-Resolution Temperature Measurement Using Phase-Compensating Interferometer and Frequency-Monitoring Interferometer

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Copyright (c) 1994 The Japan Society of Applied Physics
, , Citation Fumio Murakami et al 1994 Jpn. J. Appl. Phys. 33 1708 DOI 10.1143/JJAP.33.1708

1347-4065/33/3S/1708

Abstract

A noncontact interferometric thermometry method based on phase-compensating interferometry is described. Direct frequency monitoring by the reference interferometer connected in parallel to the sensing interferometer provides temperature measurement of high accuracy.

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10.1143/JJAP.33.1708