Theoretical Analysis of GaInAsP/InP Multiple Micro-Cavity Laser

Fundamental lasing properties of a new type of laser, which consists of a multiple micro-cavity structure with vertical grooves, was theoretically investigated based on an improved perturbation feedback theory in combination with the transfer matrix method. In order to suppress a diffraction loss between semiconductor micro-cavities, an MMC laser having grooves buried with low loss polymer (Benzocyclobutene: BCB) was proposed. Attainable maximum reflectivity was calculated to be higher than 98% for quarter wavelength wide grooves buried with BCB polymer (refractive index of 1.546, number of the micro-cavity elements of 8), which was higher than that of the semiconductor micro-cavity/air groove periodic structure. As a result, a moderately low threshold current operation (1 mA for a stripe width of 1 µm) can be obtained for the total cavity length of 45 µm with the micro-cavity length of 4.90 µm (9 elements).