Molecular Beam Epitaxy of High Magnesium Content Single-Phase Wurzite MgxZn1-xO Alloys (x≃0.5) and Their Application to Solar-Blind Region Photodetectors

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Published 1 April 2003 Copyright (c) 2003 The Japan Society of Applied Physics
, , Citation Tsuyoshi Takagi et al 2003 Jpn. J. Appl. Phys. 42 L401 DOI 10.1143/JJAP.42.L401

1347-4065/42/4B/L401

Abstract

A series of single-phase wurzite MgxZn1-xO alloys from x=0 to 0.5 were successfully obtained by molecular beam epitaxial growth on sapphire substrates, resulting in artificial tuning of band gap energy Eg from 3.3 to 4.5 eV which covers UV-A, UV-B, and solar-blind spectral regions. The problem of phase separation ever reported in the growth of MgxZn1-xO with higher Mg content, e.g., x>0.4 and Eg>3.9 eV, has been overcome by using a ZnO buffer layer. The Mg0.5Zn0.5O layers have been applied to a planar geometry Schottky type metal-semiconductor-metal photodetector, exhibiting the photoresponse for the wavelength shorter than 270 nm which correspond to the solar-blind region.

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10.1143/JJAP.42.L401