Reactive Ion Etching of Indium‐Tin‐Oxide Films

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© 1989 ECS - The Electrochemical Society
, , Citation Z. Calahorra et al 1989 J. Electrochem. Soc. 136 1839 DOI 10.1149/1.2097042

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1 Department of Electrical Engineering and Computer Sciences, Berkeley Sensor and Actuator Center, University of California, Berkeley, California 94720

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  1. Received 17 January 1989

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