Abstract
Decomposition of trimethylgallium (TMG) and triethylgallium (TEG) in hydrogen and nitrogen atmospheres was studied by a quadrupole mass analyzer. The decomposition reactions of TMG in 
and in 
and of TEG in 
and in 
take place in the temperature ranges 370°–460°, 450°–570°, 220°–330°, and 270°–380°C, respectively. The reaction mechanisms are hydrogenolysis for TMG in 
, homolytic fission for TMG in 
, and β elimination for TEG in both 
and 
. The hydrogenolysis of TMG follows homogeneous first‐order kinetics on TMG concentration.