Abstract
A novel technique for the production of iron oxide films from a polymer precursor is described. Films of poly(vinylferrocene) (PVFc) can be converted to iron oxide films in either a 200W oxygen plasma at room temperature or thermally in oxygen at 380°C. The thermal decomposition appears to be more suitable for routine use, and process parameters for this technique have been optimized. The thermal conversion has been studied using infrared, visible, and u.v. spectroscopy and a decomposition reaction proposed. The iron oxide films prepared from PVFc have chemical and physical properties similar to the iron oxide films prepared using the iron pentacarbonyl process. Films prepared from PVFc are presently being evaluated for use as semitransparent photolithographic masks.