Si nanoparticles in SiO2 An atomic scale observation for optimization of optical devices

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Published 30 July 2009 Europhysics Letters Association
, , Citation E. Talbot et al 2009 EPL 87 26004 DOI 10.1209/0295-5075/87/26004

0295-5075/87/2/26004

Abstract

Three-dimensional imaging of silicon nanoclusters array in silicon-rich silicon oxide layers was evidenced and studied. The atom probe tomography technique allows to give the composition of the nanoclusters and the composition of the interface with the silica matrix. These results give new insights for the understanding of the properties of Si-based photonic devices.

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10.1209/0295-5075/87/26004