Ionized cluster beam (ICB) deposition and processes

T. Takagi

doi:10.1351/pac198860050781

Publicly Available Published by De Gruyter January 1, 2009

Ionized cluster beam (ICB) deposition and processes

T. Takagi

From the journal Pure and Applied Chemistry

https://doi.org/10.1351/pac198860050781

Abstract

Conference

International Symposium on Plasma Chemistry, International Symposium on Plasma Chemistry, ISPC, Plasma Chemistry, Eighth, Tokyo, Japan, 1987-08-31–1987-09-04

Published Online: 2009-01-01

Published in Print: 1988-01-01

Ionized cluster beam (ICB) deposition and processes

Abstract

Conference

Journal and Issue

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