Compact scanning confocal chromatic sensor enabling precision 3-D
measurements

Daniel Wertjanz; Thomas Kern; Ernst Csencsics; Gerhard Stadler; Georg Schitter

doi:10.1364/AO.428374

Applied Optics
Vol. 60,
Issue 25,
pp. 7511-7517
(2021)
•https://doi.org/10.1364/AO.428374

Compact scanning confocal chromatic sensor enabling precision 3-D measurements

Daniel Wertjanz, Thomas Kern, Ernst Csencsics, Gerhard Stadler, and Georg Schitter

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Daniel Wertjanz, Thomas Kern, Ernst Csencsics, Gerhard Stadler, and Georg Schitter, "Compact scanning confocal chromatic sensor enabling precision 3-D measurements," Appl. Opt. 60, 7511-7517 (2021)

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Related Topics
Table of Contents Category
- Instrumentation and Measurements
Optics & Photonics Topics
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The topics in this list come from the Optics and Photonics Topics applied to this article.

About this Article
History
- Original Manuscript: April 20, 2021
- Revised Manuscript: July 6, 2021
- Manuscript Accepted: July 16, 2021
- Published: August 23, 2021

Abstract

This paper proposes a compact and lightweight scanning confocal chromatic sensor (SCCS) for robot-based precision three-dimensional (3-D) surface measurement applications. The integrated system design includes a 2-D fast steering mirror (FSM) to manipulate the optical path of a high precision 1-D confocal chromatic sensor (CCS). A data-driven calibration procedure is used to accurately combine the FSM deflection angles and the correspondingly measured distances to the sample surface in order to obtain a correctly reconstructed 3-D image. Lissajous scan trajectories are applied to enable efficient scans of the sample surface. The SCCS provides 3-D images at frame rates of up to 1 fps and a measurement volume of $0.35 \times 0.25 \times 1.8 \;{{\rm mm}^3}$, as well as the measurement of arbitrary regions of interest. Using a calibration standard including structures with defined sizes, the lateral and axial resolutions are determined to 2.5 µm and 76 nm, respectively.

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Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

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Property	Value
Mass	$< 300 g$
Lateral measurement range	$250 \times 250 µ m^{2}$
Axial resolution	$< 1 µ m$
Lateral resolution	$< 10 µ m$
Imaging rate	up to 1 fps

Coeff.	$f_{x} (ϕ, θ)$	$f_{y} (ϕ, θ)$	$f_{z} (ϕ, θ)$
$p_{00}$	566 µm	164.4 µm	985.1 µm
$p_{10}$	$- 18.3 µ m / V$	$- 66.7 µ m / V$	$253 n m / V$
$p_{01}$	$- 4.7 µ m / V$	$- 16.2 µ m / V$	$- 52.5 n m / V$
$p_{20}$	$- 441.7 n m / V^{2}$	$- 71.8 n m / V^{2}$	$119.6 n m / V^{2}$
$p_{11}$	$- 313.4 n m / V^{2}$	$236.9 n m / V^{2}$	$104.1 n m / V^{2}$
$p_{02}$	$- 518.8 n m / V^{2}$	$- 31 n m / V^{2}$	$48.2 n m / V^{2}$
$p_{30}$	$- 41.5 n m / V^{3}$	$- 26.4 n m / V^{3}$	$11.2 n m / V^{3}$
$p_{21}$	$- 264.1 n m / V^{3}$	$253.7 n m / V^{3}$	$- 3.5 n m / V^{3}$
$p_{12}$	$- 163.4 n m / V^{3}$	$35.4 n m / V^{3}$	$19.3 n m / V^{3}$
$p_{03}$	$- 25.4 n m / V^{3}$	$- 87.6 n m / V^{3}$	$- 1.1 n m / V^{3}$
$p_{40}$	$32.9 n m / V^{4}$	$29.4 n m / V^{4}$	0
$p_{31}$	$49 n m / V^{4}$	$- 45.6 n m / V^{4}$	0
$p_{22}$	$26.8 n m / V^{4}$	$- 1.3 n m / V^{4}$	0
$p_{13}$	$57.7 n m / V^{4}$	$- 48.1 n m / V^{4}$	0
$p_{04}$	$40.9 n m / V^{4}$	$23.8 n m / V^{4}$	0
$p_{50}$	$1.2 n m / V^{5}$	$5 n m / V^{5}$	0
$p_{41}$	$25.4 n m / V^{5}$	$- 32.3 n m / V^{5}$	0
$p_{32}$	$14.6 n m / V^{5}$	$- 5 n m / V^{5}$	0
$p_{23}$	$17.1 n m / V^{5}$	$- 12.7 n m / V^{5}$	0
$p_{14}$	$1.9 n m / V^{5}$	$4.4 n m / V^{5}$	0
$p_{05}$	$1.3 n m / V^{5}$	$5.48 n m / V^{5}$	0

Property	Value
Mass	$< 300 g$
Lateral measurement range	$250 \times 250 µ m^{2}$
Axial resolution	$< 1 µ m$
Lateral resolution	$< 10 µ m$
Imaging rate	up to 1 fps

Coeff.	$f_{x} (ϕ, θ)$	$f_{y} (ϕ, θ)$	$f_{z} (ϕ, θ)$
$p_{00}$	566 µm	164.4 µm	985.1 µm
$p_{10}$	$- 18.3 µ m / V$	$- 66.7 µ m / V$	$253 n m / V$
$p_{01}$	$- 4.7 µ m / V$	$- 16.2 µ m / V$	$- 52.5 n m / V$
$p_{20}$	$- 441.7 n m / V^{2}$	$- 71.8 n m / V^{2}$	$119.6 n m / V^{2}$
$p_{11}$	$- 313.4 n m / V^{2}$	$236.9 n m / V^{2}$	$104.1 n m / V^{2}$
$p_{02}$	$- 518.8 n m / V^{2}$	$- 31 n m / V^{2}$	$48.2 n m / V^{2}$
$p_{30}$	$- 41.5 n m / V^{3}$	$- 26.4 n m / V^{3}$	$11.2 n m / V^{3}$
$p_{21}$	$- 264.1 n m / V^{3}$	$253.7 n m / V^{3}$	$- 3.5 n m / V^{3}$
$p_{12}$	$- 163.4 n m / V^{3}$	$35.4 n m / V^{3}$	$19.3 n m / V^{3}$
$p_{03}$	$- 25.4 n m / V^{3}$	$- 87.6 n m / V^{3}$	$- 1.1 n m / V^{3}$
$p_{40}$	$32.9 n m / V^{4}$	$29.4 n m / V^{4}$	0
$p_{31}$	$49 n m / V^{4}$	$- 45.6 n m / V^{4}$	0
$p_{22}$	$26.8 n m / V^{4}$	$- 1.3 n m / V^{4}$	0
$p_{13}$	$57.7 n m / V^{4}$	$- 48.1 n m / V^{4}$	0
$p_{04}$	$40.9 n m / V^{4}$	$23.8 n m / V^{4}$	0
$p_{50}$	$1.2 n m / V^{5}$	$5 n m / V^{5}$	0
$p_{41}$	$25.4 n m / V^{5}$	$- 32.3 n m / V^{5}$	0
$p_{32}$	$14.6 n m / V^{5}$	$- 5 n m / V^{5}$	0
$p_{23}$	$17.1 n m / V^{5}$	$- 12.7 n m / V^{5}$	0
$p_{14}$	$1.9 n m / V^{5}$	$4.4 n m / V^{5}$	0
$p_{05}$	$1.3 n m / V^{5}$	$5.48 n m / V^{5}$	0

Abstract

Data Availability

Cited By

Figures (8)

Tables (2)

Equations (12)

Applied Optics