Abstract
We design and fabricate an ultrahigh coupling efficiency (CE) fully etched
apodized grating coupler on the silicon-on-insulator (SOI) platform using
subwavelength photonic crystals and bonded aluminum mirror. Fabrication error
sensitivity and coupling angle dependence are experimentally investigated. A
record ultrahigh CE of with a 3 dB bandwidth of 71 nm and
low back reflection are demonstrated.
© 2014 Optical Society of America
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