X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source

Andrei Tkachuk; Fred Duewer; Hongtao Cui; Michael Feser; Steve Wang; Wenbing Yun

doi:10.1524/zkri.2007.222.11.650

Published by De Gruyter (O) September 25, 2009

X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source

Andrei Tkachuk , Fred Duewer , Hongtao Cui , Michael Feser , Steve Wang and Wenbing Yun

From the journal Zeitschrift für Kristallographie - Crystalline Materials

https://doi.org/10.1524/zkri.2007.222.11.650

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High-resolution X-ray computed tomography (XCT) enables nondestructive 3D imaging of complex structures, regardless of their state of crystallinity. This work describes a sub-50 nm resolution XCT system operating at 8 keV in absorption and Zernike phase contrast modes based on a commercially available Cu rotating anode laboratory X-ray source. The system utilizes a high efficiency reflective capillary condenser lens and high-resolution Fresnel zone plates with an outermost zone width of 35 nm and 700 nm structure height resulting in a spatial resolution better than 50 nm currently. Imaging a fragment of the solid oxide fuel cells (SOFC) with 50 nm resolution is presented as an application example of the XCT technique in materials science and nanotechnology.

Keywords: X-ray microscopy; Computed tomography; Fresnel zone plate; SOFC; Fuel cell; Nanotechnology

Received: 2007-May-30

Accepted: 2007-August-13

Published Online: 2009-9-25

Published in Print: 2007-11-1

X-ray computed tomography in Zernike phase contrast mode at 8 keV with 50-nm resolution using Cu rotating anode X-ray source

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