電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
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金属におけるフェムト秒レーザーナノアブレーションの閾値フルーエンス
橋田 昌樹宮坂 泰弘西井 崇也清水 雅弘井上 峻介阪部 周二
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2015 年 135 巻 10 号 p. 575-580

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Femtosecond laser nano-ablation of Ti by short-pulse laser irradiation (800 nm/40 fs) is studied in the laser fluence range of 0.07-0.5 J/cm2. To determine the ablation threshold, the ablation rate dependence on laser fluence is precisely measured. Multi-shot ablation threshold of titanium is found to be 0.074 J/cm2 in which value is good agreement with that reported previously by other group. To discuss the ablation mechanism, all the ablation thresholds for metals previously published are plotted as a function of work function and melting temperature. We found that the ablation thresholds correlated with work function of metals. Experimental data suggested that the femtosecond laser ablation is mainly due to multi-photon absorption and optical field ionization.

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