Skip to main content
Log in

Solid phase equilibria in the Au-Ga-As, Au-Ga-Sb, Au-In-As, and Au-In-Sb ternaries

  • Articles
  • Published:
Journal of Materials Research Aims and scope Submit manuscript

Abstract

The Au-Ga-As, Au-Ga-Sb, Au-In-As, and Au-In-Sb ternaries were surveyed using x-ray powder diffraction to determine which metallic phases exist at equilibrium with the III-V compound semiconductors. In closed, small-volume systems (i.e., formation of gas-phase products was prevented), Au does not react with GaAs but does react with the other III-V’s investigated to produce Au-group III intermetallic compounds and another solid phase containing the group V element. However, each semiconductor formed pseudobinary systems with at least two different intermetallic compounds. The bulk phase diagrams determined in this study provide frameworks within which much of the experimental data in the literature concerning the products of reactions at Au/III-V interfaces can be understood.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. T. J. Magee and J. Peng, Phys. Status Solidi A 32, 695 (1975).

    Article  CAS  Google Scholar 

  2. H. B. Kim, A. F. Loves, G. G. Sweeny and T. M. S. Heng, Inst. Phys. Conf. Ser. No. 33b, 145 (1977).

    Google Scholar 

  3. R. H. Williams, R. R. Varma, and A. Mckinley, J. Phys. C 10, 4545 (1977).

    Article  CAS  Google Scholar 

  4. B. Tuck, K. T. Ip, and L. F. Eastman, Thin Solid Films 55, 41 (1978).

    Article  CAS  Google Scholar 

  5. D. V. Morgan, M. J. Howes, and W. J. Devlin, J. Phys. D 11, 1341 (1978).

    Article  CAS  Google Scholar 

  6. N. Szydlo and J. Oliver, J. Appl. Phys. 50, 1445 (1979).

    Article  CAS  Google Scholar 

  7. P. A. Barnes and R. S. Williams, Solid-State Electron. 24, 907 (1981).

    Article  CAS  Google Scholar 

  8. A. K. Sinha and J. M. Poate, Thin Films: Interdiffusion and Reactions, edited by J. M. Poate, K. M. Tu, and J. W. Mayer (Wiley, New York, 1978), pp. 407–432.

    Google Scholar 

  9. E. Kinsbron, P. K. Gallagher, and A. T. English, Solid-State Electron. 22, 517 (1979).

    Article  CAS  Google Scholar 

  10. K. Kumar, Jpn. J. Appl. Phys. 18, 713 (1979).

    Article  CAS  Google Scholar 

  11. J. M. Vandenberg and E. Einsbron, Thin Solid Films 65, 259 (1980).

    Article  CAS  Google Scholar 

  12. D. C. Miller, J. Electrochem. Soc. 127, 467 (1980).

    Article  CAS  Google Scholar 

  13. S. Leung, A. G. Milines, and D. D. L. Chung, Thin Solid Films 104, 109 (1983).

    Article  CAS  Google Scholar 

  14. S. Leung, T. Yoshiie, C. L. Bauer, and A. G. Milines, J. Electrochem. Soc. 130, 462 (1983).

    Article  CAS  Google Scholar 

  15. T. Yoshiie and C. L. Bauer, J. Vac. Sci. Technol. A 1(2), XXX (1983).

  16. T. Yoshiie, C. L. Bauer, and A. G. Milines, Thin Solid Films 111, 149 (1984).

    Article  Google Scholar 

  17. X. Zeng and D. D. L. Chung, Solid-State Electron. 27, 339 (1984).

    Article  CAS  Google Scholar 

  18. P. W. Chye, I. Lindau, P. Pianetta, C. M. Garner, C. Y. Su, and W. E. Spicer, Phys. Rev. B 18, 5545 (1978).

    Article  CAS  Google Scholar 

  19. I. Lindau, P. W. Chye, C. M. Garner, P. Pianetta, C. Y. Su, and W. E. Spicer, J. Vac. Sci. Technol. 15, 132 (1978).

    Google Scholar 

  20. A. L. AUred, J. Inorg. Nucl. Chem. 17, 215 (1961).

    Article  CAS  Google Scholar 

  21. G. P. Schwartz, G. J. Gaultieri, J. E. Griffiths, C. D. Thurmond, and B. Schwartz, J. Electrochem. Soc. 127, 2488 (1980).

    Article  CAS  Google Scholar 

  22. C. D. Thurmond, G. P. Schwartz, G. W. Kammlott, and B. Schwartz, J. Electrochem. Soc. 127, 1366 (1980).

    Article  CAS  Google Scholar 

  23. G. P. Schwartz, Thin Solid Films 103, 3 (1983).

    Article  CAS  Google Scholar 

  24. M. B. Panish, J. Electrochem. Soc. 114, 517 (1967).

    Google Scholar 

  25. C. H. P. Lupis, Chemical Thermodynamics of Materials (North-Holland, New York, 1983).

    Google Scholar 

  26. R. S. Williams (to be published).

  27. JCPDS, Powder Diffraction File: Inorganic Phase (1984), International Center for Diffraction Data.

  28. V. K. Nikitina and Y. K. Lobanova, Izv. Akad. Nauk SSSR, Neorg. Mater. 10, 1596 (1974).

    CAS  Google Scholar 

  29. R. Kubiak and K. Schubert, Z. Metallkd. 71, 635 (1980).

    CAS  Google Scholar 

  30. A. A. Babitsyna and N. P. Luzhnaya, Zh. Neorg. Khim. 17, 1741 (1974).

    Google Scholar 

  31. C. J. Cooke and W. Hume-Rothery, J. Less-Common Met. 10, 42 (1966).

    Article  CAS  Google Scholar 

  32. M. Puselj and K. Schubert, J. Less-Common Met. 38, 83 (1974).

    Article  CAS  Google Scholar 

  33. S. E. R. Hiscocks and W. Hume-Rothery, Proc. R. Soc. (London), Ser. A 282, 318(1964).

    CAS  Google Scholar 

  34. M. Hansen, Constitution of Binary Alloys (McGraw-Hill, New York, 1958).

    Book  Google Scholar 

  35. R. P. Elliot, Constitution of Binary Alloys, First Supplement (McGraw-Hill, New York, 1965).

    Google Scholar 

  36. F. A. Shunk, Constitution of Binary Alloys, Second Supplement (McGraw-Hill, New York, 1969).

    Google Scholar 

  37. W. G. Moffatt, Binary Phase Diagrams Handbook (General Electric Co., Schenectady, 1977).

    Google Scholar 

  38. J. H. Pugh and R. S. Williams, J. Mater. Res. 1, 343 (1986).

    Article  CAS  Google Scholar 

  39. I. Mojzes, T. Sebestyen, P. B. Barna, G. Gergely, and D. Szigethy, Thin Solid Films 61, 27 (1979).

    Article  CAS  Google Scholar 

  40. I. Mojzes, T. Sebestyen, and D. Szigethy, Solid-State Electron. 25, 449 (1982).

    Article  CAS  Google Scholar 

  41. J. R. Lince and R. S. Williams, Thin Solid Films (to be published).

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Thomas, T.C., Williams, R.S. Solid phase equilibria in the Au-Ga-As, Au-Ga-Sb, Au-In-As, and Au-In-Sb ternaries. Journal of Materials Research 1, 352–360 (1986). https://doi.org/10.1557/JMR.1986.0352

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/JMR.1986.0352

Navigation