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Growth of diamond films and characterization by Raman, scanning electron microscopy, and x-ray photoelectron spectroscopy

  • Diamond and Diamond-Like Materials
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Abstract

We have deposited diamond films on Si<111> using hot filament assisted chemical vapor deposition at low pressures ~25 Torr. Diamond films deposited at different relative concentrations of methane (ranging from 0.25% to 2.0%) in methane-hydrogen mixtures have been characterized by Raman spectroscopy, scanning electron microscopy, and x-ray photoelectron spectroscopy. With varying methane concentration, Raman spectra show features characteristic of crystalline diamond, diamond-like carbon, and polycrystalline graphite. Scanning electron micrographs show densely packed diamond crystallites. SEM measurements made on diamond films grown as a function of time show that the median grain size of the diamond crystallites increases linearly with time during the initial phase of the growth. X-ray photoelectron spectroscopy reveals differences between the diamond sp3 covalent bonding and sp2 graphitic bonding as well as the extent of s-p hybridization as a function of methane concentration. The plasmon loss shoulder, characteristic of graphite, is absent from the spectrum of 0.25% methane concentration film. But it appears in the XPS spectra of films grown at higher concentrations.

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Authors and Affiliations

  1. Center for Positron Studies, Department of Physics, The University of Texas at Arlington, 76019, Arlington, Texas, USA

    S. C. Sharma, M. Green, R. C. Hyer, C. A. Dark & T. D. Black

  2. Department of Physics, East Texas State University, 75428, Commerce, Texas, USA

    A. R. Chourasia & D. R. Chopra

  3. Department of Chemistry, The University of Texas at Arlington, 76019, Arlington, Texas, USA

    K. K. Mishra

Authors
  1. S. C. Sharma
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  2. M. Green
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  3. R. C. Hyer
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  4. C. A. Dark
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  5. T. D. Black
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  6. A. R. Chourasia
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  7. D. R. Chopra
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  8. K. K. Mishra
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Sharma, S.C., Green, M., Hyer, R.C. et al. Growth of diamond films and characterization by Raman, scanning electron microscopy, and x-ray photoelectron spectroscopy. Journal of Materials Research 5, 2424–2432 (1990). https://doi.org/10.1557/JMR.1990.2424

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  • DOI: https://doi.org/10.1557/JMR.1990.2424

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