Abstract
Constant load creep experiments were conducted using a depth-sensing indentation instrument with indentation depths in the submicron range. Experiments were conducted on polycrystalline Sn and sputtered Al films on Si substrates. The results show that the plastic depth versus time curves and the strain rate versus stress plots from these experiments are analogous to those obtained from conventional creep experiments using bulk specimens. The value of the stress exponent for Sn is close to the reported values from uniaxial creep tests. Tests on Al films showed that the stress exponent is dependent on the indentation depth and is governed by the proximity to the film/substrate interface. Load change experiments were also performed and the data from these tests were analyzed. It is concluded that indentation creep experiments may be useful in elucidating the deformation properties of materials and in identifying deformation mechanisms.
Similar content being viewed by others
References
Μ. Α. Korhonen, W. R. LaFontaine, C. A. Paszkiet, R. D. Black, and Che-Yu Li, in Thin Films: Stresses and Mechanical Properties II, edited by M. F. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 159.
W. R. LaFontaine, B. Yost, R. D. Black, and Che-Yu Li, in Thin Films: Stresses and Mechanical Properties II, edited by M. F. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 165.
W. C. Oliver, C. J. McHargue, and S. J. Zinkle, Thin Solid Films 153, 185 (1987).
D. Stone, W. R. LaFontaine, P. Alexopoulos, T-W. Wu, and Che-Yu Li, J. Mater. Res. 3, 141 (1988).
T-W. Wu, Thin Films: Stresses and Mechanical Properties II, edited by M. F. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 191.
M. J. Mayo, R. W. Siegel, A. Narayanasamy, and W. D. Nix, J. Mater. Res. 5, 1073 (1990).
S. N. G. Chu and J. C. M. Li, J. Mater. Sci. 12, 2200 (1977).
S. N. G. Chu and J. C. M. Li, Mater. Sci. and Eng. 45, 167 (1980).
S. N. G. Chu and J. C. M. Li, Mater. Sci. and Eng. 39, 1 (1979).
S-P. Hannula, D. Stone, and Che-Yu Li, in Electronic Packaging Materials Science, edited by E. A. Giess, K-N. Tu, and D. R. Uhlmann (Mater. Res. Soc. Symp. Proc. 40, Pittsburgh, PA, 1985), p. 217.
T. W. Wu, M. Moshref, and P. S. Alexopoulos, Thin Solid Films 187, 295 (1990).
W. R. LaFontaine, B. Yost, R. D. Black, and C-Y. Li, J. Mater. Res. 5, 2100 (1990).
M. J. Mayo and W. D. Nix, Strength of Metals and Alloys, edited by P. O. Kettunen, T. K. Lepistö, and M. E. Lehtonen (Pergamon, Oxford, 1988), p. 1415.
W. D. Nix, Metall. Trans. 20A, 2217 (1989).
M. F. Doerner and W. D. Nix, J. Mater. Res. 1, 601 (1986).
J. Pethica, R. Hutchings, and W. C. Oliver, Philos. Mag. A 48, 593 (1983).
C. N. Ahlquist and W. D. Nix, Scripta Metall. 3, 679 (1969).
R. Horiuchi and M. Otsuka, Trans. Jpn. Inst. Metal. 13, 284 (1972).
F. A. Mohammed, K. L. Murty, and J. W. Morris, Metall. Trans. 4, 935 (1973).
W. D. Nix and B. Ilschner, Strength of Metals and Alloys, edited by P. Haasen, V. Gerold, and G. Kostorz (Pergamon Press, Oxford, 1979), Vol. 3, p. 1503.
H. M. Hawthorne and J. N. Sherwood, Trans. Faraday Soc. 66, 1792 (1970).
R. E. Frenkel, O. D. Sherby, and J. E. Dorn, Acta Metall. 3, 470 (1955).
Τ. G. Langdon, Metals Forum 1, 59 (1978).
O. D. Sherby, R. H. Klundt, and A. K. Miller, Metall. Trans. 8A, 843 (1977).
V. Raman and R. Berriche, Thin Films: Stresses and Mechanical Properties II, edited by M. F. Doerner, W. C. Oliver, G. M. Pharr, and F. R. Brotzen (Mater. Res. Soc. Symp. Proc. 188, Pittsburgh, PA, 1990), p. 171.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Raman, V., Berriche, R. An investigation of the creep processes in tin and aluminum using a depth-sensing indentation technique. Journal of Materials Research 7, 627–638 (1992). https://doi.org/10.1557/JMR.1992.0627
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1992.0627