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Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process

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Abstract

A two-step seeding process has been developed to lower the transformation temperature and modify the grain structure of ferroelectric lead zirconate titanate (PZT) thin films with high Zr/Ti ratio. Previous study has shown that nucleation is the rate-limiting step for the perovskite formation. Therefore, any process that enhances the kinetics of nucleation is likely to decrease the transformation temperature. In this process, a very thin (45 nm) seeding layer of PbTiO3, which has a low effective activation energy for perovskite formation, was used to provide nucleation sites needed for the low temperature perovskite formation. In this study, we have shown that the pyrochlore-to-perovskite phase transformation temperature of PbZrxTi1−xO3 films of high Zr/Ti ratio (e.g., x = 53/47) can be lowered by as much as 100 °C. The grain size of these films can also be substantially modified by this two-step approach.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Virginia Polytechnic Institute and State University, 24061, Blacksburg, Virginia, USA

    Chi Kong Kwok & Seshu B. Desu

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  1. Chi Kong Kwok
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  2. Seshu B. Desu
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Kwok, C.K., Desu, S.B. Low temperature perovskite formation of lead zirconate titanate thin films by a seeding process. Journal of Materials Research 8, 339–344 (1993). https://doi.org/10.1557/JMR.1993.0339

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  • DOI: https://doi.org/10.1557/JMR.1993.0339

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