Abstract
Conductive SrRuO3 thin films were epitaxially grown on (100) LaAlO3 substrates by pulsed laser deposition over a temperature range from 650 °C to 825 °C. Well-textured films exhibiting a strong orientation relationship to the underlying substrate could be obtained at a deposition temperature as low as 450 °C. The degree of crystallinity of the films improved with increasing deposition temperature as confirmed by x-ray diffraction, transmission electron microscopy, and scanning tunneling microscopy. Scanning electron microscopy revealed no particulates on the film surface. The resistivity of the SrRuO3 thin films was found to be a strong function of the crystallinity of the film and hence the substrate temperature during film deposition. A residual resistivity ratio (RRR = ρ300 K/ρ4.2 K) of more than 8 was obtained for the SrRuO3 thin films deposited under optimized processing conditions.
Similar content being viewed by others
References
X. D. Wu, S.R. Foltyn, R.C. Dye, Y. Coulter, and R.E. Muenchausen, Appl. Phys. Lett. 62, 2434 (1993).
P. Tiwari, XD. Wu, S. R. Foltyn, M. Q. Le, I.H. Campbell, R. C. Dye, and R. E. Muenchausen, Appl. Phys. Lett. 64, 634 (1994).
L. Antognazza, K. Char, T. H. Geballe, L. L. H. King, and A. W. Sleight, Appl. Phys. Lett. 63, 1005 (1993).
R. Domel, C. L. Jia, C. Competti, G. Ockenfuss, and A. I. Braginski, Supercond. Sci. Technol. 7, 277 (1994).
C. B. Eom, R. B. van Dover, J.M. Phillips, D. J. Werder, J.H. Marshall, C. H. Chen, R. J. Cava, R. M. Fleming, and D. K. Fork, Appl. Phys. Lett. 63, 2570 (1993).
Q. X. Jia, X. D. Wu, S. R. Foltyn, and P. Tiwari, Appl. Phys. Lett. 66, 2197 (1995).
L. A. Wills and J. Amano, in Ferroelectric Thin Films IV, edited by S. B. Desu, B. A. Tuttle, R. Ramesh, and T. Shiosaki (Mater. Res. Soc. Symp. Proc. 361, Pittsburgh, PA, 1995), p. 470.
S. Y. Hou, J. Kwo, R. K. Watts, J.Y. Cheng, and D. K. Fork, Appl. Phys. Lett. 67, 1387 (1995).
C. B. Eom, R. J. Cava, R. H. Fleming, J. M. Phillips, R. B. van Dover, J. H. Marshall, J.W. P. Hsu, J. J. Krajewski, and W. F. Peck, Jr., Science 258, 1766 (1992).
Y. Nora and S. Miyahara, J. Phys. Soc. Jpn. 27, 518 (1969).
R. J. Bouchard and J.L. Gillson, Mater. Res. Bull. 7, 873 (1972).
G. Koren, A. Gupta, R. J. Baseman, M. I. Lutwyche, and R. B. Laibowitz, Appl. Phys. Lett. 55, 2450 (1989).
A. Callaghan, C. W. Moeller, and R. Ward, Inorg. Chem. 5, 1572 (1966).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Jia, Q.X., Chu, F., Adams, C.D. et al. Characteristics of conductive SrRuO3 thin films with different microstructures. Journal of Materials Research 11, 2263–2268 (1996). https://doi.org/10.1557/JMR.1996.0287
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1557/JMR.1996.0287