Abstract
Polycrystalline Y2O3/ZrO2 superlattice thin films were deposited using opposedcathode reactive magnetron sputtering. Pulsed direct-current power was used to eliminate arcing on the metallic targets. Radio-frequency power was applied to the substrates to achieve ion bombardment of the growing film. In order to reproducibly deposit at high rates in Ar–O2 mixtures, the Y target voltage was used to indirectly feedback-control the O2 partial pressure. Deposition rates as high as ∼70% of the pure metal rates were achieved, typically 3.5 μm/h. Superlattices with periods ranging from 2.6 to 95 nm were deposited. Y2O3 layer thicknesses were either 75% or 50% of the superlattice period. X-ray diffraction and transmission electron microscopy studies showed well-defined superlattice layers. The ZrO2 layers exhibited the high-temperature cubic-fluorite structure, which was epitaxially stabilized by the cubic Y2O3 layers, for thicknesses ≤7 nm. The equilibrium monoclinic structure was observed for thicker ZrO2 layers. Nanoindentation hardnesses ranged from 11.1 to 14.5 GPa with little dependence on period. The hardness results are discussed in terms of current superlattice hardening theories.
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U. Helmersson, S. Todorova, S.A. Barnett, J-E. Sundgren, L.C. Markert, and J.E. Greene, J. Appl. Phys. 62, 481 (1987).
M. Shinn, L. Hultman, and S.A. Barnett, J. Mater. Res. 7, 901 (1992).
X. Chu, M.S. Wong, W.D. Sproul, S.L. Rohde, and S.A. Barnett, J. Vac. Sci. Technol. A 10, 1604 (1992).
S. Menezes and D.P. Anderson, J. Electrochem. Soc. 137, 440 (1990).
X. Chu and S.A. Barnett, J. Appl. Phys. 77, 4403 (1995).
P.M. Anderson and C. Li, Nanostruct. Mater. 5, 349 (1995).
T.F. Page, W.C. Oliver, and C.J. McHargue, J. Mater. Res. 7, 450 (1992).
G.S. Was and T. Foecke, Thin Solid Films 286, 1 (1996).
C.R. Aita, M.D. Wiggins, R. Whig, and C.M. Scanlon. J. Appl. Phys. 79, 1176 (1996).
M. Rühle, J. Vac. Sci. Technol. A 3, 749 (1985).
R.C. Garvie, J. Phys. Chem. 82, 218 (1978).
R. Banerjee, R. Ahuja, and H. Fraser, Phys. Rev. Lett. 76, 3778 (1996).
A. Madan, I.W. Kim, S.C. Cheng, P. Yashar, V.P. Dravid, and S.A. Barnett, Phys. Rev. Lett. 78, 1743 (1997).
P. Yashar, X. Chu, S.A. Barnett, J. Rechner, Y.Y. Wang, M.S. Wong, and W.D. Sproul, Appl. Phys. Lett. 72, 987 (1998).
M. Ohring, The Materials Science of Thin Films (Academic Press, New York, 1992).
U. Helmersson and J.E. Sundgren, J. Electron Microsc. Techn. 4, 361 (1986).
W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992).
J.S. Browder, S.S. Ballad, and P. Klocek, in Handbook of Infrared Optical Materials, edited by P. Klocek (Marcel Dekker, New York, 1991), Chap. 5.
H. Ljungcrantz, L. Hultman, J-E. Sundgren, and L. Karlsson, J. Appl. Phys. 78, 832 (1995).
D.M. Mattox, J. Vac. Sci. Technol. A 7, 1105 (1989).
L.G. Parrat, Phys. Rev. 95, 359 (1954).
D.G. Stearns, J. Appl. Phys. 65, 491 (1989).
E. Leven and H. McMurdie, Phase Equilibria Diagrams: Phase Diagrams for Ceramists, (American Ceramic Society, Wester-ville, OH, 1992), Vol. 9.
P. Villars and L.D. Calvert, Pearson’s Handbook of Crystallo-graphic Data for Intermetallic Phases (American Society for Metals, Metals Park, OH, 1985), Vol. 1.
R. Wallenberg, R. Withers, D.J.M. Bevan, J.G. Thompson, P. Barlow, and B.G. Hyde, J. Less-Common Met. 156, 1–16 (1989).
R.L. Withers, J.G. Thompson, N. Gabbitas, L.R. Wallenberg, and T.R. Welberry, J. Solid State Chem. 120, 290 (1995).
P. Yashar, J. Rechner, M.S. Wong, W.D. Sproul, and S.A. Bar-nett, Surf. Coat. Technol. 94–95, 333 (1997).
S.A. Barnett, in Physics of Thin Films, edited by M. Francombe and J.A. Vossen (Academic Press, New York, 1993).
E.S. Pacheco and T. Mura, J. Mech. Phys. Solids. 17, 163 (1969).
J. Lankford, J. Mater. Sci. 21, 1981 (1986).
T.H. Courtney, Mechanical Behavior of Materials (McGraw-Hill, Inc., New York, 1990).
J.E. Krzanowski, Scr. Metall. Mater. 25, 1465 (1991).
A. Madan, Y.Y. Wang, S.A. Barnett, C. Engström, H. Ljung-crantz, L. Hultman, and M. Grimsditch, J. Appl. Phys. 84, 776 (1998).
R.H.J. Hannink and M.V. Swain, in Annual Review of Materials Science (Annual Reviews, Inc., Palo Alto, CA, 1994), Vol. 24, p 359.
M. Odén, Ph.D. Thesis, Linköping Studies in Science and Technology, Dissertation No. 411, Linköping University, 1995.
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Yashar, P.C., Barnett, S.A., Hultman, L. et al. Deposition and mechanical properties of polycrystalline Y2O3/ZrO2 superlattices. Journal of Materials Research 14, 3614–3622 (1999). https://doi.org/10.1557/JMR.1999.0488
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DOI: https://doi.org/10.1557/JMR.1999.0488