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Growth and Characterization of Na0.5K0.5NbO3 Thin Films on Polycrystalline Pt80Ir20 Substrates

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Abstract

Na0.5K0.5NbO3 thin films have been deposited onto textured polycrystalline Pt80Ir20 substrates using radio frequency magnetron sputtering. Films were grown in off- and on-axis positions relative to the target at growth temperatures of 500–700 °C and sputtering pressures of 1–7 Pa. The deposited films were found to be textured, displaying a mixture of two orientations (001) and (101). Films grown on-axis showed a prefered (001) orientation, while the off-axis films had a (101) orientation. Scanning electron microscopy showed that the morphology of the films was dependent on the substrate position and sputtering pressure. The low-frequency (10 kHz) dielectric constants of the films were found to be in the range of approximately 490–590. Hydrostatic piezoelectric measurements showed that the films were piezoelectric in the as-deposited form with a constant up to 14.5 pC/N.

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Author information

Author notes

  1. Xin Wang

    Present address: Acreo AB, Bredgatan 34, SE-602 21, Norrköp-ing, Sweden

Authors and Affiliations

  1. Department of Physics, Linköping University, SE-581 83, Linköping, Sweden

    Xin Wang, Sveinn Olafsson, Lynnette D. Madsen, Staffan Rudner, Ivan P. Ivanov & Ulf Helmersson

  2. Swedish Defence Research Agency (FOI), Box 1165, SE-581 11, Linköping, Sweden

    Staffan Rudner

  3. Department of Condensed Matter Physics, Royal Institute of Technology, Electrum 229, SE-164 40, Stockholm-Kista, Sweden

    Alex Grishin

  4. University of Iceland, Dunhaga 3, 107, Reykjavik, Iceland

    Sveinn Olafsson

  5. Department of Materials Science & Engineering, Carnegie Mellon University, 15213, Pittsburgh, PA

    Lynnette D. Madsen

  6. Cypress Semiconductor Inc., 2401 East 86 Street, 55425, Bloomington, MN

    Ivan P. Ivanov

Authors
  1. Xin Wang
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  2. Sveinn Olafsson
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  3. Lynnette D. Madsen
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  4. Staffan Rudner
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  7. Ulf Helmersson
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Wang, X., Olafsson, S., Madsen, L.D. et al. Growth and Characterization of Na0.5K0.5NbO3 Thin Films on Polycrystalline Pt80Ir20 Substrates. Journal of Materials Research 17, 1183–1191 (2002). https://doi.org/10.1557/JMR.2002.0175

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  • DOI: https://doi.org/10.1557/JMR.2002.0175

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