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X-ray photoelectron spectroscopy characterization and morphology of MgO thin films grown on single-crystalline diamond (100)

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Abstract

The morphology and composition of MgO films grown on single-crystalline diamond (100) have been studied. MgO thin films were deposited in the substrate temperature range from room temperature (RT) to 723 K by means of electron beam evaporation using a MgO powder source. Atomic force microscopy images indicated that the film grown at RT without O2 supply was relatively uniform and flat whereas that deposited in oxygen ambient yielded higher growth rates and rough surface morphologies. X-ray photoelectron spectroscopy analyses demonstrate that the MgO film deposited at RT without O2 has the composition closest to that of the stoichiometric MgO and that a thin contaminant layer composed mainly of magnesium peroxide (before etching) or hydroxide (after etching) was unintentionally formed on the film surface, respectively.These results will be discussed in relation to the interaction among the evaporated species and intentionally supplied oxygen molecules at the growth front as well as the interfacial energy between diamond and MgO.

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Authors and Affiliations

  1. Department of Electrical Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan

    S. M. Lee & T. Ito

  2. Superconductor Photonics Center, Osaka University, 2-1 Yamada-oka, Suita, Osaka, 565-0871, Japan

    H. Murakami

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  1. S. M. Lee
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  2. T. Ito
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  3. H. Murakami
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Lee, S.M., Ito, T. & Murakami, H. X-ray photoelectron spectroscopy characterization and morphology of MgO thin films grown on single-crystalline diamond (100). Journal of Materials Research 17, 1914–1922 (2002). https://doi.org/10.1557/JMR.2002.0284

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  • DOI: https://doi.org/10.1557/JMR.2002.0284

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