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Fabrication and structural characterization of self-supporting electrolyte membranes for a micro solid-oxide fuel cell

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Abstract

Micromachined fuel cells are among a class of microscale devices being explored for portable power generation. In this paper, we report processing and geometric design criteria for the fabrication of free-standing electrolyte membranes for microscale solid-oxide fuel cells. Submicron, dense, nanocrystalline yttria-stabilized zirconia (YSZ) and gadolinium-doped ceria (GDC) films were deposited onto silicon nitride membranes using electron-beam evaporation and sputter deposition. Selective silicon nitride removal leads to free-standing, square, electrolyte membranes with side dimensions as large as 1025 μm for YSZ and 525 μm for GDC, with high processing yields for YSZ. Residual stresses are tensile (+85 to +235 MPa) and compressive (–865 to -155 MPa) in as-deposited evaporated and sputtered films, respectively. Tensile evaporated films faul via brittle fracture during annealing at temperatures below 773 K; thermal limitations are dependent on the film thickness to membrane size aspect ratio. Sputtered films with compressive residual stresses show superior mechanical and thermal stability than evaporated films. Sputtered 1025-μm membranes survive annealing at 773 K, which leads to the generation of tensile stresses and brittle fracture at elevated temperatures (923 K).

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Author notes

  1. Chelsey D. Baertsch

    Present address: School of Chemical Engineering, Purdue University, West Lafayette, IN, 47907, USA

  2. Srikar T. Vengallatorec

    Present address: Department of Mechanical Engineering, McGill University, Quebec, H3A 2K6, Canada

Authors and Affiliations

  1. Department of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA

    Chelsey D. Baertsch & Klavs F. Jensen

  2. Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA

    Joshua L. Hertz & Harry L. Tuller

  3. Department of Aeronautics and Astronautics, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA

    Srikar T. Vengallatorec & S. Mark Spearing

  4. Microsystems Technology Center, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA

    Martin A. Schmidt

Authors
  1. Chelsey D. Baertsch
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  2. Klavs F. Jensen
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  3. Joshua L. Hertz
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  4. Harry L. Tuller
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  5. Srikar T. Vengallatorec
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  7. Martin A. Schmidt
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Correspondence to Klavs F. Jensen.

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Baertsch, C.D., Jensen, K.F., Hertz, J.L. et al. Fabrication and structural characterization of self-supporting electrolyte membranes for a micro solid-oxide fuel cell. Journal of Materials Research 19, 2604–2615 (2004). https://doi.org/10.1557/JMR.2004.0350

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  • DOI: https://doi.org/10.1557/JMR.2004.0350

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