Skip to main content
SpringerLink
Log in

Metamorphic III–V semiconductor lasers grown on silicon

  • Metamorphic Epitaxial Materials
  • Published:
MRS Bulletin Aims and scope Submit manuscript

Abstract

The epitaxial integration of III–V optoelectronic devices on silicon will be the enabling technology for full-scale deployment of silicon photonics and the key to improving communication systems. Silicon photonics also offer new opportunities for the realization of ultracompact and fully integrated sensing systems operating in the mid-infrared (MIR) regime of the spectrum. In this article, we review recent developments, through several approaches, in the direct metamorphic epitaxial growth of various III–V materials-based lasers on silicon substrates. We show that GaAs-based 1.3-μm III–V quantum dot lasers and GaSb-based MIR quantum-well lasers grown on silicon substrates can operate with low threshold current density and high operating temperature, which hold promise for the future.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Figure 1
Figure 2
Figure 3
Figure 4

Similar content being viewed by others

References

  1. D.A.B. Miller, Proc. IEEE 97, 1166 (2009).

    Article  CAS  Google Scholar 

  2. R.A. Soref, S.J. Emelett, W.R. Buchwald, J. Opt. A Pure Appl. Opt. 8, 840 (2006).

    Article  CAS  Google Scholar 

  3. R.A. Soref, Nat. Photonics 4, 495 (2010).

    Article  CAS  Google Scholar 

  4. B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).

    Article  CAS  Google Scholar 

  5. B. Jalali, S. Fathpour, J. Lightwave Technol. 24, 4600 (2006).

    Article  CAS  Google Scholar 

  6. H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, M. Paniccia, Nature 4, 725 (2005).

    Article  CAS  Google Scholar 

  7. R.E. Camacho-Aguilera, Y. Cai, N. Patel, J.T. Bessette, M. Romagnoli, L.C. Kimerling, J. Michel, Opt. Express 20, 11316 (2012).

    Article  CAS  Google Scholar 

  8. S. Wirths, R. Geiger, N. von den Driesch, G. Mussler, T. Stoica, S. Mantl, Z. Ikonic, M. Luysberg, S. Chiussi, J.M. Hartmann, H. Sigg, J. Faist, D. Buca, D. Grützmacher, Nat. Photonics 9, 88 (2015).

    Article  CAS  Google Scholar 

  9. K. Tanabe, K. Watanabe, Y. Arakawa, Sci. Rep. 2, 349 (2015).

    Article  CAS  Google Scholar 

  10. G. Duan, S. Olivier, S. Malhouitre, A. Accard, P. Kaspar, G. de Valicourt, G. Levaufre, N. Girard, A. Le Liepvre, A. Shen, D. Make, F. Lelarge, C. Jany, K. Ribaud, F. Mallecot, P. Charbonnier, H. Gariah, C. Kopp, J.-L. Gentner, J. Lightwave Technol. 33, 976 (2015).

    Article  CAS  Google Scholar 

  11. M. Sugo, H. Mori, Y. Itoh, Y. Sakai, M. Tachikawa, Jpn. J. Appl. Phys. 30, 3876 (1991).

    Article  CAS  Google Scholar 

  12. T. Yamada, M. Tachikawa, T. Sasaki, H. Mori, Y. Kadota, Appl. Phys. Lett. 70, 1614 (1997).

    Article  CAS  Google Scholar 

  13. H. Zimmermann, Integrated Silicon Optoelectronics, Springer Series in Optical Sciences, vol. 148 ( Springer-Verlag, Berlin/Heidelberg, 2010).

    Book  Google Scholar 

  14. H. Kroemer, J. Cryst. Growth 81, 193 (1987).

    Article  CAS  Google Scholar 

  15. A. Ishizaka, Y. Shiraki, J. Electrochem. Soc. 133, 666 (1986).

    Article  CAS  Google Scholar 

  16. W. Kern, J. Electrochem. Soc. 137, 1887 (1990).

    Article  CAS  Google Scholar 

  17. K. Madiomanana, M. Bahri, J.B. Rodriguez, L. Largeau, L. Cerutti, O. Mauguin, A. Castellano, G. Patriarche, E. Tournié, J. Cryst. Growth 413, 17 (2015).

    Article  CAS  Google Scholar 

  18. E. Tournié, A.N. Baranov, in Advances in Semiconductor Lasers, Semiconductors and Semimetals Series, vol. 86, J.J. Coleman, A.C. Brice, C. Jagadish, Eds. (Academic Press, Burlington, VT, 2012), pp. 183–226.

    Chapter  Google Scholar 

  19. L. Cerutti, A. Castellano, J.-B. Rodriguez, M. Bahri, L. Largeau, A. Balocchi, K. Madiomanana, F. Lelarge, G. Patriarche, X. Marie, E. Tournié, Appl. Phys. Lett. 106, 101102 (2015).

    Article  CAS  Google Scholar 

  20. I. Vurgaftman, R. Weih, M. Kamp, J.R. Meyer, C.L. Canedy, C.S. Kim, M. Kim, W.W. Bewley, C.D. Merritt, J. Abell, S. Höfling, J. Phys. D Appl. Phys. 48, 123001 (2015).

    Article  CAS  Google Scholar 

  21. M. Bahriz, G. Lollia, A.N. Baranov, R. Teissier, Opt. Express 23, 1523 (2015).

    Article  CAS  Google Scholar 

  22. S.H. Huang, G. Balakrishnan, A. Khoshakhlagh, L.R. Dawson, D.L. Huffaker, Appl. Phys. Lett. 97, 071102 (2008).

    Article  CAS  Google Scholar 

  23. Y.H. Kim, Y.K. Noh, M.D. Kim, J.E. Oh, K.S. Chung, Thin Solid Films 518, 2280 (2010).

    Article  CAS  Google Scholar 

  24. A. Trampert, E. Tournié, K.H. Ploog, Appl. Phys. Lett. 66, 2265 (1995).

    Article  CAS  Google Scholar 

  25. K. Akahane, N. Yamamoto, S.-I. Gozu, N. Ohtani, J. Cryst. Growth 264, 21 (2004).

    Article  CAS  Google Scholar 

  26. A. Jallipalli, M.N. Kutty, G. Balakrishnan, J. Tatebayashi, N. Nuntawong, S.H. Huang, L.R. Dawson, D.L. Huffaker, Z. Mi, P. Bhattacharya, Electron. Lett. 44, 1198 (2007).

    Article  CAS  Google Scholar 

  27. J. Tatebayashi, A. Jallipalli, M.N. Kutty, S. Huang, K. Nunna, G. Balakrishnan, L.R. Dawson, D.L. Huffaker, IEEE J. Sel. Top. Quantum Electron. 15, 716 (2009).

    Article  CAS  Google Scholar 

  28. J.B. Rodriguez, L. Cerutti, P. Grech, E. Tournié, Appl. Phys. Lett. 94, 061124 (2009).

    Article  CAS  Google Scholar 

  29. J. Reboul, L. Cerutti, J. Rodriguez, P. Grech, E. Tournié, Appl. Phys. Lett. 99, 121113 (2011).

    Article  CAS  Google Scholar 

  30. L. Cerutti, J.B. Rodriguez, E. Tournié, IEEE Photonics Technol. Lett. 22, 553 (2010).

    Article  CAS  Google Scholar 

  31. M. Djafari Rouhani, H. Kassem, J. Dalla Torre, G. Landa, A. Rocher, D. Estève, Mater. Sci. Eng. B 88, 181 (2002).

    Article  Google Scholar 

  32. Z. Mi, P. Bhattacharya, J. Yang, Electron. Lett. 41, 742 (2005).

    Article  CAS  Google Scholar 

  33. Z. Mi, J. Yang, P. Bhattacharya, G. Qin, Z. Ma, Proc. IEEE 97, 1239 (2009).

    Article  CAS  Google Scholar 

  34. A. Lee, H. Liu, A. Seeds, Semicond. Sci. Technol. 28, 015027 (2013).

    Article  CAS  Google Scholar 

  35. J. Wu, S. Chen, A. Seeds, H. Liu, J. Phys. D Appl. Phys. 48, 363001 (2015).

    Article  CAS  Google Scholar 

  36. T. Wang, H. Liu, A. Lee, F. Pozzi, A. Seeds, Opt. Express 19, 11381 (2011).

    Article  CAS  Google Scholar 

  37. A.D. Lee, Q. Jiang, M. Tang, Y. Zhang, A.J. Seeds, H. Liu, IEEE J. Sel. Top. Quantum Electron. 19, 1901107 (2013).

    Article  CAS  Google Scholar 

  38. M. Tang, S. Chen, J. Wu, Q. Jiang, V.G. Dorogan, M. Benamara, Y.I. Mazur, G.J. Salamo, A. Seeds, H. Liu, Opt. Express 22, 11528 (2014).

    Article  CAS  Google Scholar 

  39. S. Chen, M. Tang, J. Wu, Q. Jiang, V.G. Dorogan, M. Benamara, Y.I. Mazur, G.J. Salamo, A. Seeds, H. Liu, Electron. Lett. 50, 1467 (2014).

    Article  CAS  Google Scholar 

  40. S. Chen, M. Tang, Q. Jiang, J. Wu, V.G. Dorogan, M. Benamara, Y.I. Mazur, G.J. Salamo, P. Smowton, A. Seeds, H. Liu, ACS Photonics 1, 638 (2014).

    Article  CAS  Google Scholar 

  41. S.Chen, M. Tang, J. Wu, Q. Jiang, V. Dorogan, M. Benamara, Y.I. Mazur, G.J. Salamo, H. Liu, Photonics 2, 646 (2015).

    Article  CAS  Google Scholar 

  42. H. Liu, T. Wang, Q. Jiang, R. Hogg, F. Tutu, F. Pozzi, A. Seeds, Nat. Photonics 5, 416 (2011).

    Article  CAS  Google Scholar 

  43. A. Lee, Q. Jiang, M. Tang, A. Seeds, and H. Liu, Opt. Express 20, 22181 (2012).

    Article  CAS  Google Scholar 

  44. A.Y. Liu, C. Zhang, J. Norman, A. Snyder, D. Lubyshev, J.M. Fastenau A.W.K. Liu, A.C. Gossard, J.E. Bowers, Appl. Phys. Lett. 104, 041104 (2014).

    Article  CAS  Google Scholar 

  45. A.Y. Liu, S. Srinivasan, J. Norman, A.C. Gossard, J.E. Bowers, IEEE J. Sel. Top. Quantum Electron. 21, 1900708 (2015).

    Google Scholar 

  46. K. Voltz, A. Beyer, W. Witte, J. Ohlmann, I. Németh, B. Kunert, W. Stolz, J. Cryst. Growth 315, 37 (2011).

    Article  CAS  Google Scholar 

  47. T.N. Thanh, C. Robert, W. Guo, A. Letoublon, C. Cornet, G. Elias, A. Ponchet, T. Rohel, N. Bertru, A. Balocchi, O. Durand, J.S. Micha, M. Perrin, S. Loualiche, X. Marie, A. Le Corre, J. Appl. Phys. 112, 053521 (2012).

    Article  CAS  Google Scholar 

  48. S. Liebich, M. Zimprich, A. Beyer, C. Lange, D.J. Franzbach, S. Chatterjee, N. Hossain, S.J. Sweeney, K. Volz, B. Kunert, W. Stolz, Appl. Phys. Lett. 99 071109 (2011).

    Article  CAS  Google Scholar 

  49. J.P. Gauthier, C. Robert, S. Almosni, Y. Leger, M. Perrin, J. Even, A. Balocchi H. Carrère, X. Marie, C. Cornet, O. Durand, Appl. Phys. Lett. 105, 243111 (2014).

    Article  CAS  Google Scholar 

  50. Y. Song, M.L. Lee, Appl. Phys. Lett. 103, 141906 (2013).

    Article  CAS  Google Scholar 

  51. X. Huang, Y. Song, T. Masuda, D. Jung, M. Lee, Electron. Lett. 50, 1226 (2014).

    Article  CAS  Google Scholar 

Download references

Acknowledgements

Part of the authors’ work has been supported by the French “Investment for the Future” program (EquipEx EXTRA, ANR-11-EQPX-0016), by the French ANR (OPTOSi, ANR-12-BS03–002), and by UK EPSRC under Grant No. EP/J012904/1. E.T. gratefully acknowledges support from the Institut Universitaire de France (IUF) and A. Trampert (PDI, Berlin) for TEM analysis.

Author information

Authors and Affiliations

  1. Université de Montpellier, and Institut Universitaire de France, France

    Eric Tournié

  2. Université de Montpellier, France

    Laurent Cerutti & Jean-Baptiste Rodriguez

  3. Department of Electronic and Electrical Engineering, University College London, UK

    Huiyun Liu, Jiang Wu & Siming Chen

Authors
  1. Eric Tournié
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Laurent Cerutti
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Jean-Baptiste Rodriguez
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Huiyun Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jiang Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Siming Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Eric Tournié.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tournié, E., Cerutti, L., Rodriguez, JB. et al. Metamorphic III–V semiconductor lasers grown on silicon. MRS Bulletin 41, 218–223 (2016). https://doi.org/10.1557/mrs.2016.24

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/mrs.2016.24

Search

Navigation